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Breakdown and defect generation in ultra-thin gate oxide

Date

1996
Journal article
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dc.contributor.authorDepas, Michel
dc.contributor.authorVermeire, Bert
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorHeyns, Marc
dc.date.accessioned2021-09-29T14:27:21Z
dc.date.available2021-09-29T14:27:21Z
dc.date.embargo9999-12-31
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1206
dc.source.beginpage382
dc.source.endpage386
dc.source.issue1
dc.source.journalJournal of Applied Physics
dc.source.volume80
dc.title

Breakdown and defect generation in ultra-thin gate oxide

dc.typeJournal article
dspace.entity.typePublication
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