Publication:
Nanobeam diffraction strain analysis of released Ge gate-all-around nano-wires: challenges and limitations
Date
| dc.contributor.author | Favia, Paola | |
| dc.contributor.author | Witters, Liesbeth | |
| dc.contributor.author | Capogreco, Elena | |
| dc.contributor.author | Vancoille, Eric | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.imecauthor | Favia, Paola | |
| dc.contributor.imecauthor | Witters, Liesbeth | |
| dc.contributor.imecauthor | Capogreco, Elena | |
| dc.contributor.imecauthor | Vancoille, Eric | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.contributor.orcidimec | Favia, Paola::0000-0002-1019-3497 | |
| dc.date.accessioned | 2021-10-25T18:35:46Z | |
| dc.date.available | 2021-10-25T18:35:46Z | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/30698 | |
| dc.identifier.url | http://abstracts.imc19.com/pdf/abstract_203.pdf | |
| dc.source.conference | 19th International Microscopy Congress - IMC19 | |
| dc.source.conferencedate | 9/09/2018 | |
| dc.source.conferencelocation | Sydney Australia | |
| dc.title | Nanobeam diffraction strain analysis of released Ge gate-all-around nano-wires: challenges and limitations | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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