Publication:
Non-destructive characterisation of porosity and pore size distribution in porous low-k dielectric films
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1910 since deposited on 2021-10-14
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Acq. date: 2025-12-11
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Views
1910 since deposited on 2021-10-14
2last month
2last week
Acq. date: 2025-12-11
Citations