Publication:
Non-destructive characterisation of porosity and pore size distribution in porous low-k dielectric films
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Mogilnikov, K. P. | |
| dc.date.accessioned | 2021-10-14T16:36:40Z | |
| dc.date.available | 2021-10-14T16:36:40Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5037 | |
| dc.source.beginpage | 352 | |
| dc.source.conference | ICSICT - 6th International Conference on Solid-State Integrated Circuit Technology. Proceedings | |
| dc.source.conferencedate | 22/10/2001 | |
| dc.source.conferencelocation | Shanghai China | |
| dc.source.endpage | 357 | |
| dc.title | Non-destructive characterisation of porosity and pore size distribution in porous low-k dielectric films | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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