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Stress and wafer warpage analysis of GaN thin film induced by transfer bonding process on 200mm Si substrate
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Stress and wafer warpage analysis of GaN thin film induced by transfer bonding process on 200mm Si substrate
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Date
2013
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lofrano, Melina
;
Pham, Nga
;
Rosmeulen, Maarten
;
Soussan, Philippe
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1840
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Acq. date: 2025-12-16
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Metrics
Views
1840
since deposited on 2021-10-21
1
last month
Acq. date: 2025-12-16
Citations