Publication:

Surface chemistry of deposition processes for epitaxial Si-O superlattices

Date

2014
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Author(s)

Delabie, Annelies  
;
Jayachandran, Suseendran  
;
Billen, Arne
;
Douhard, Bastien  
;
Conard, Thierry  
;
Meersschaut, Johan  
;
Bender, Hugo  
;
Demeulemeester, Jelle
;
Vandervorst, Wilfried  
;
Caymax, Matty  
;
Heyns, Marc  

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1899 since deposited on 2021-10-22
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