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Surface chemistry of deposition processes for epitaxial Si-O superlattices

Date

2014
Meeting abstract
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dc.contributor.authorDelabie, Annelies
dc.contributor.authorJayachandran, Suseendran
dc.contributor.authorBillen, Arne
dc.contributor.authorDouhard, Bastien
dc.contributor.authorConard, Thierry
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorBender, Hugo
dc.contributor.authorDemeulemeester, Jelle
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorCaymax, Matty
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorJayachandran, Suseendran
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.date.accessioned2021-10-22T01:12:54Z
dc.date.available2021-10-22T01:12:54Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23743
dc.identifier.urlhttp://www.ald2014.org/pdf/ALD2014Program_V4.pdf
dc.source.beginpage122
dc.source.conference14th International Conference on Atomic Layer Deposition - ALD
dc.source.conferencedate15/06/2014
dc.source.conferencelocationKyoto Japan
dc.title

Surface chemistry of deposition processes for epitaxial Si-O superlattices

dc.typeMeeting abstract
dspace.entity.typePublication
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