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Nanometer scale characterisation of CoSi2 and NiSi induced strain in silicon by convergent beam electron diffraction
Publication:
Nanometer scale characterisation of CoSi2 and NiSi induced strain in silicon by convergent beam electron diffraction
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Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Benedetti, Alessandro
;
Bender, Hugo
;
Torregiani, Cristina
;
Van Dal, Mark
;
Maex, Karen
Journal
Materials Science and Engineering B
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1960
since deposited on 2021-10-15
Acq. date: 2025-12-10
Citations
Metrics
Views
1960
since deposited on 2021-10-15
Acq. date: 2025-12-10
Citations