Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase

Gylfason, Kristinn B.

doi:10.1364/OE.480219

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Edinger, Pierre

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Jo, Gaehun

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Nguyen, Chris Phong Van

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Takabayashi, Alain Yuji

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Errando-Herranz, Carlos

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Gylfason, Kristinn B.

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OPTICS EXPRESS

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135 since deposited on 2023-03-26

Acq. date: 2025-10-24

1227 since deposited on 2023-03-26

Acq. date: 2025-10-24

Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase

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