Publication:

Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase

Date

2023
Journal article
https://doi.org/10.1364/OE.480219
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dc.contributor.authorEdinger, Pierre
dc.contributor.authorJo, Gaehun
dc.contributor.authorNguyen, Chris Phong Van
dc.contributor.authorTakabayashi, Alain Yuji
dc.contributor.authorErrando-Herranz, Carlos
dc.contributor.authorAntony, Cleitus
dc.contributor.authorTalli, Giuseppe
dc.contributor.authorVerheyen, Peter
dc.contributor.authorKhan, Muhammad Umar
dc.contributor.authorBleiker, Simon J.
dc.contributor.authorBogaerts, Wim
dc.contributor.authorQuack, Niels
dc.contributor.authorNiklaus, Frank
dc.contributor.authorGylfason, Kristinn B.
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorKhan, Muhammad Umar
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecVerheyen, Peter::0000-0002-8245-9442
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecKhan, Muhammad Umar::0000-0001-5760-7485
dc.date.accessioned2023-07-05T12:57:03Z
dc.date.available2023-03-26T03:49:59Z
dc.date.available2023-07-05T12:57:03Z
dc.date.embargo2023-02-13
dc.date.issued2023
dc.description.wosFundingTextThis work has received funding from the European Union's Horizon 2020 research and innovation programme under grant agreements No. 780283 (MORPHIC) , and No. 825272 (ULISSES) .
dc.identifier.doi10.1364/OE.480219
dc.identifier.issn1094-4087
dc.identifier.pmidMEDLINE:36823907
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41371
dc.publisherOptica Publishing Group
dc.source.beginpage6540
dc.source.endpage6551
dc.source.issue4
dc.source.journalOPTICS EXPRESS
dc.source.numberofpages12
dc.source.volume31
dc.subject.keywordsBACKSCATTERING
dc.title

Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase

dc.typeJournal article
dspace.entity.typePublication
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