Discussion on the figures of merit of identified traps located in the Si flm: surface versus volume trap densities

dc.contributor.author	Cretu, Bogdan
dc.contributor.author	Simoen, Eddy
dc.contributor.author	Hellings, Geert
dc.contributor.author	Linten, Dimitri
dc.contributor.author	Claeys, Cor
dc.contributor.imecauthor	Simoen, Eddy
dc.contributor.imecauthor	Hellings, Geert
dc.contributor.imecauthor	Linten, Dimitri
dc.contributor.orcidimec	Simoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimec	Hellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimec	Linten, Dimitri::0000-0001-8434-1838
dc.date.accessioned	2021-10-28T20:53:00Z
dc.date.available	2021-10-28T20:53:00Z
dc.date.issued	2020
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/34942
dc.identifier.url	https://doi.org/10.1149/09705.0045ecst
dc.source.beginpage	45
dc.source.conference	237th ECS Spring Meeting - Advanced CMOS-compatible Semiconductor Devices 19
dc.source.conferencedate	10/05/2020
dc.source.conferencelocation	Bristol UK
dc.source.endpage	51
dc.title	Discussion on the figures of merit of identified traps located in the Si flm: surface versus volume trap densities
dc.type	Proceedings paper
dspace.entity.type	Publication
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