Publication:
Effects of different processing conditions on line edge roughness for 193-nm and 157-nm resists
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1914 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-11
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Metrics
Views
1914 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-11
Citations