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Integration and electrical evaluation of Epi-Si and Epi-SiGe channels for 3D NAND memory applications
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1900 since deposited on 2021-10-22
4last month
Acq. date: 2026-01-09
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Metrics
Views
1900 since deposited on 2021-10-22
4last month
Acq. date: 2026-01-09
Citations