Publication:

Edge trimming for wafer-to-wafer 3D integration

Date

2016

Proceedings Paper

Simple item page Full metadata Statistics

Files

33017.pdf 784.73 KB

Author(s)

Inoue, Fumihiro

;

;

;

Moeller, Berthold

;

Yokoyama, Kaori

;

;

Kosemura, Daisuke

;

De Wolf, Ingrid

;

Rebibis, Kenneth June

;

;

;

Statistics

2041 since deposited on 2021-10-23

1last month

Acq. date: 2026-01-25