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Structural characterization of buried epitaxial b-FeSi2 layers in (111) silicon

Date

1994
Proceedings Paper
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dc.contributor.authorTavares, J.
dc.contributor.authorBender, Hugo
dc.contributor.authorLarsen, Kim Kyllesbech
dc.contributor.authorLauwers, Anne
dc.contributor.authorMaex, Karen
dc.contributor.authorVan Rossum, Marc
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-09-29T12:48:48Z
dc.date.available2021-09-29T12:48:48Z
dc.date.embargo9999-12-31
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/376
dc.source.beginpage639
dc.source.conferenceProceedings of the 13th International Conference on Electron Microscopy - ICEM
dc.source.conferencedate17/07/1994
dc.source.conferencelocationParis France
dc.source.endpage640
dc.title

Structural characterization of buried epitaxial b-FeSi2 layers in (111) silicon

dc.typeProceedings paper
dspace.entity.typePublication
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