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DTCO of Nanosheet and Forksheet Architectures: Exploring Dielectric Walls, Contacting Schemes, and Active Regions for Optimized RO Performance
Publication:
DTCO of Nanosheet and Forksheet Architectures: Exploring Dielectric Walls, Contacting Schemes, and Active Regions for Optimized RO Performance
Date
2024
Proceedings Paper
https://doi.org/10.1109/EDTM58488.2024.10511609
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Gaddemane, Gautam
;
Schuddinck, Pieter
;
Bhuwalka, Krishna
;
Rzepa, Gerhard
;
Mirabelli, Gioele
;
Matagne, Philippe
;
Yakimets, Dmitry
;
Wu, Hao
;
Hellings, Geert
;
Liu, Changze
Journal
N/A
Abstract
Description
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Views
232
since deposited on 2024-09-14
Acq. date: 2025-10-25
Citations
Metrics
Views
232
since deposited on 2024-09-14
Acq. date: 2025-10-25
Citations