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High-k/ metal-gate stack work-function tuning by rare-earth capping layers: interface dipole or bulk charge?

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1867 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-09

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1867 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-09

Citations