Observation and suppression of nickel germanide overgrowth on germanium substrates with patterned SiO2 structures

dc.contributor.author	Brunco, David
dc.contributor.author	Opsomer, Karl
dc.contributor.author	De Jaeger, Brice
dc.contributor.author	Winderickx, Gillis
dc.contributor.author	Verheyden, Kurt
dc.contributor.author	Meuris, Marc
dc.contributor.imecauthor	Opsomer, Karl
dc.contributor.imecauthor	De Jaeger, Brice
dc.contributor.imecauthor	Winderickx, Gillis
dc.contributor.imecauthor	Meuris, Marc
dc.contributor.orcidimec	De Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimec	Meuris, Marc::0000-0002-9580-6810
dc.date.accessioned	2021-10-17T06:24:38Z
dc.date.available	2021-10-17T06:24:38Z
dc.date.embargo	9999-12-31
dc.date.issued	2008
dc.identifier.issn	1099-0062
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/13460
dc.source.beginpage	H39
dc.source.endpage	H41
dc.source.issue	2
dc.source.journal	Electrochemical and Solid-State Letters
dc.source.volume	11
dc.title	Observation and suppression of nickel germanide overgrowth on germanium substrates with patterned SiO2 structures
dc.type	Journal article
dspace.entity.type	Publication
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