Publication:

EUV single patterning validation of curvilinear routing

Date

2023-04-28
Proceedings Paper
https://doi.org/10.1117/12.2654633
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 1.71 MB

Author(s)

Treska, Fergo  
;
Xu, Dongbo  
;
Gillijns, Werner  
;
Sherazi, Yasser  

Journal

Proceedings of SPIE; Vol.12494

Abstract

Description

Statistics

Downloads

119 since deposited on 2023-11-29
14last month
Acq. date: 2026-06-06

Views

332 since deposited on 2023-11-29
Acq. date: 2026-06-06

Citations

Statistics

Downloads

119 since deposited on 2023-11-29
14last month
Acq. date: 2026-06-06

Views

332 since deposited on 2023-11-29
Acq. date: 2026-06-06

Citations