Publication:
Imaging of H2 bubbles and the related strain field in silicon wafers exposed to RF hydrogen plasma
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2009 since deposited on 2021-10-15
1last month
Acq. date: 2026-04-05
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Statistics
Views
2009 since deposited on 2021-10-15
1last month
Acq. date: 2026-04-05
Citations