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AlGaN/GaN HEMT grown on large size silicon substrates by MOVPE capped with in-situ deposited Si3N4

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1934 since deposited on 2021-10-16
2last month
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Acq. date: 2025-12-08

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1934 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2025-12-08

Citations