Publication:

XPS and TOFSIMS studies of shallow Si/Si1-xGex/Si layers

Date

1999

Journal article

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Author(s)

Conard, Thierry

;

De Witte, Hilde

;

;

;

Vandervorst, Wilfried

;

;

Gijbels, Renaat

Journal

Thin Solid Films

Statistics

2094 since deposited on 2021-10-06

Acq. date: 2026-06-05