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XPS and TOFSIMS studies of shallow Si/Si1-xGex/Si layers
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XPS and TOFSIMS studies of shallow Si/Si1-xGex/Si layers
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Date
1999
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Conard, Thierry
;
De Witte, Hilde
;
Loo, Roger
;
Verheyden, P.
;
Vandervorst, Wilfried
;
Caymax, Matty
;
Gijbels, Renaat
Journal
Thin Solid Films
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2092
since deposited on 2021-10-06
Acq. date: 2025-12-11
Citations
Metrics
Views
2092
since deposited on 2021-10-06
Acq. date: 2025-12-11
Citations