Publication:
A wafer-level poly-SiGe-based thin film packaging technology demonstrated on a SOI-based high-Q MEM resonator
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1963 since deposited on 2021-10-19
Acq. date: 2025-12-08
Citations
Metrics
Views
1963 since deposited on 2021-10-19
Acq. date: 2025-12-08
Citations