Publication:
A wafer-level poly-SiGe-based thin film packaging technology demonstrated on a SOI-based high-Q MEM resonator
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1969 since deposited on 2021-10-19
3last month
Acq. date: 2026-08-18
Citations
Statistics
Views
1969 since deposited on 2021-10-19
3last month
Acq. date: 2026-08-18
Citations