Publication:
Sub-nanometer pore sealing solution of ultra- porous oxycarbosilane-based spin-on dielectrics
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1801 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-15
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Views
1801 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-15
Citations