Publication:
Sub-nanometer pore sealing solution of ultra- porous oxycarbosilane-based spin-on dielectrics
Date
| dc.contributor.author | Armini, Silvia | |
| dc.contributor.imecauthor | Armini, Silvia | |
| dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
| dc.date.accessioned | 2021-10-22T00:43:53Z | |
| dc.date.available | 2021-10-22T00:43:53Z | |
| dc.date.issued | 2014 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23499 | |
| dc.source.conference | 1st BeLux Workshop on "Coating, Materials, Surfaces and Interfaces" | |
| dc.source.conferencedate | 10/09/2014 | |
| dc.source.conferencelocation | Luxembourg Luxembourg | |
| dc.title | Sub-nanometer pore sealing solution of ultra- porous oxycarbosilane-based spin-on dielectrics | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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