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Test structures for MCM-D technology characterization
Publication:
Test structures for MCM-D technology characterization
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Date
1999
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lozano, M.
;
Santander, J.
;
Cabruja, E.
;
Perello, Carles
;
Ullan, M.
;
Lora-Tamayo, E.
;
Doyle, R.
;
McCarthy, C.
;
Barton, J.
Journal
IEEE Trans. Semiconductor Manufacturing
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1977
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Acq. date: 2025-12-11
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Metrics
Views
1977
since deposited on 2021-10-14
1
last month
1
last week
Acq. date: 2025-12-11
Citations