Publication:

Stuffing-enabled surface confinement of silanes used as sealing agents on CF4 plasma-exposed 2.0 p-OSG films

Date

2015
Journal article
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Author(s)

Sun, Yiting  
;
Levrau, Elisabeth  
;
Zhang, Liping  
;
Geypen, Jef  
;
Meersschaut, Johan  
;
Franquet, Alexis  
;
Le, Quoc Toan  
;
de Marneffe, Jean-Francois  
;
Bender, Hugo  
;
Struyf, Herbert  
;
Detavernier, Christophe
;
Baklanov, Mikhaïl
;
De Feyter, Steven
;
Armini, Silvia  

Journal

Microelectronic Engineering

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1930 since deposited on 2021-10-22
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