Publication:

Scaled-down deposited underlayers for EUV lithography

Date

2023

Proceedings Paper

https://doi.org/10.1117/12.2660376

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Author(s)

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Afonso, Joao Antunes

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Bezard, Philippe

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Fallica, Roberto

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De Simone, Danilo

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Fukuda, Hideaki

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De Roest, David

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Journal

Proceedings of SPIE

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903 since deposited on 2023-07-28

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Acq. date: 2026-09-16