Publication:
Al3Sc thin films as alternative interconnect metallization
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Acq. date: 2026-02-24
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Acq. date: 2026-02-24
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2 since deposited on 2022-10-10
Acq. date: 2026-02-24
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1048 since deposited on 2022-10-10
Acq. date: 2026-02-24
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