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Observation of critical gate oxide thickness for substrate-defect related oxide failure
Publication:
Observation of critical gate oxide thickness for substrate-defect related oxide failure
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Date
1999
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bearda, Twan
;
Houssa, Michel
;
Mertens, Paul
;
Vanhellemont, Jan
;
Heyns, Marc
Journal
Appl. Phys. Lett.
Abstract
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1986
since deposited on 2021-10-06
1
last month
Acq. date: 2025-12-16
Citations
Metrics
Views
1986
since deposited on 2021-10-06
1
last month
Acq. date: 2025-12-16
Citations