Publication:
Observation of critical gate oxide thickness for substrate-defect related oxide failure
Date
| dc.contributor.author | Bearda, Twan | |
| dc.contributor.author | Houssa, Michel | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.author | Vanhellemont, Jan | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.imecauthor | Houssa, Michel | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.contributor.orcidimec | Houssa, Michel::0000-0003-1844-3515 | |
| dc.date.accessioned | 2021-10-06T10:41:52Z | |
| dc.date.available | 2021-10-06T10:41:52Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3215 | |
| dc.source.beginpage | 1255 | |
| dc.source.endpage | 1257 | |
| dc.source.issue | 9 | |
| dc.source.journal | Appl. Phys. Lett. | |
| dc.source.volume | 75 | |
| dc.title | Observation of critical gate oxide thickness for substrate-defect related oxide failure | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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