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imec Publications
Conference contributions
Ultra-low copper baths for sub-30nm copper interconnects
Publication:
Ultra-low copper baths for sub-30nm copper interconnects
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Date
2011
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Atanasova, Tanya
;
Caluwaerts, Rudy
;
Carbonell, Laure
;
Strubbe, Katrien
;
Vereecken, Philippe
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1942
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Acq. date: 2025-12-12
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Views
1942
since deposited on 2021-10-19
1
last month
Acq. date: 2025-12-12
Citations