Publication:

Ultra-low copper baths for sub-30nm copper interconnects

Date

2011
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorAtanasova, Tanya
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorCarbonell, Laure
dc.contributor.authorStrubbe, Katrien
dc.contributor.authorVereecken, Philippe
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.date.accessioned2021-10-19T12:30:08Z
dc.date.available2021-10-19T12:30:08Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18499
dc.source.beginpage2330
dc.source.conference220th ECS Fall Meeting Symposium F4: Semiconductors, Metal Oxides and Composites
dc.source.conferencedate9/10/2011
dc.source.conferencelocationBoston, MA USA
dc.title

Ultra-low copper baths for sub-30nm copper interconnects

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions