Cost-effective RF interposer platform on low-resistivity Si enabling heterogeneous integration opportunities for beyond 5G

Publication:

2022

Proceedings Paper

Author(s)

;

Slabbekoorn, John

;

Sinha, Siddhartha

;

Bex, Pieter

;

Pinho, Nelson

;

Webers, Tomas

;

Velenis, Dimitrios

;

Miller, Andy

;

Collaert, Nadine

;

Van der Plas, Geert

;

Beyne, Eric

na

1479 since deposited on 2022-09-17

Acq. date: 2026-09-16