Publication:

Surface modification of porous low-k dielectrics

Date

2003

Proceedings Paper

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Author(s)

;

Struyf, Herbert

;

Brongersma, Sywert

;

Conard, Thierry

;

Boullart, Werner

;

Vanhaelemeersch, Serge

;

Statistics

1846 since deposited on 2021-10-15

Acq. date: 2026-02-26