Laser annealing for ultra-shallow junction formation in advanced CMOS

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Author(s)

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Ponomarev, Youri

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Verheijen, M.A.

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Hopstaken, M.J.P.

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van Berkum, J.G.M.

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Lindsay, Richard

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1983 since deposited on 2021-10-14

Acq. date: 2025-10-23