Publication:

Above-IC generic poly-SiGe thin film wafer level packaging and MEM device technology: application to accelerometers

Date

2011
Proceedings Paper
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21918.pdf 2.43 MB

Author(s)

Guo, Bin
;
Wen, Lianggong
;
Helin, Philippe  
;
Claes, Gert
;
Verbist, Agnes
;
Van Hoof, Rita  
;
Du Bois, Bert  
;
De Coster, Jeroen  
;
De Wolf, Ingrid  
;
Shahar, Abdul Hadi  
;
Li, Yunlong  
;
Cui, Hushan
;
Lux, Marcel  
;
Vereecke, Guy  
;
Tilmans, Harrie  
;
Haspeslagh, Luc  
;
Decoutere, Stefaan  
;
Osman, Haris  
;
Puers, Bob  
;
Severi, Simone  
;
Witvrouw, Ann

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