Publication:
Triangular-shaped RF MEMS switched air gap capacitor in imec's SiGe-MEMS platform
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1858 since deposited on 2021-10-21
1last month
Acq. date: 2025-12-15
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1858 since deposited on 2021-10-21
1last month
Acq. date: 2025-12-15
Citations