Publication:

Triangular-shaped RF MEMS switched air gap capacitor in imec's SiGe-MEMS platform

Date

2013
Proceedings Paper
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dc.contributor.authorBedier, Mohammed
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorRochus, Veronique
dc.contributor.authorAbdelRassoul, Roshdy
dc.contributor.authorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecRottenberg, Xavier::0000-0003-0920-1709
dc.contributor.orcidimecRochus, Veronique::0000-0001-9680-5724
dc.date.accessioned2021-10-21T06:45:22Z
dc.date.available2021-10-21T06:45:22Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22029
dc.source.conference14th Int. Conf on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsyst. - EuroSimE
dc.source.conferencedate15/04/2013
dc.source.conferencelocationWroclaw Poland
dc.title

Triangular-shaped RF MEMS switched air gap capacitor in imec's SiGe-MEMS platform

dc.typeProceedings paper
dspace.entity.typePublication
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