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On a more accurate assessment of scaled copper/low-k interconnects performance
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On a more accurate assessment of scaled copper/low-k interconnects performance
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Date
2007
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Travaly, Youssef
;
Bamal, Mandeep
;
Carbonell, Laure
;
Tokei, Zsolt
;
Van Olmen, Jan
;
Iacopi, Francesca
;
Van Hove, Marleen
;
Stucchi, Michele
;
Maex, Karen
Journal
IEEE Trans. Semiconductor Manufacturing
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Views
1908
since deposited on 2021-10-16
3
last month
3
last week
Acq. date: 2026-08-03
Citations