Publication:

Towards high performance sub-10nm finW bulk FinFET technology

Date

2016
Proceedings Paper
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Author(s)

Chiarella, Thomas  
;
Kubicek, Stefan  
;
Rosseel, Erik  
;
Ritzenthaler, Romain  
;
Hikavyy, Andriy  
;
Eyben, Pierre  
;
De Keersgieter, An  
;
Ragnarsson, Lars-Ake  
;
Kim, Min-Soo  
;
Chew, Soon Aik
;
Schram, Tom  
;
Demuynck, Steven  
;
Cupak, Miroslav  
;
Rynders, Luc  
;
Dehan, Morin
;
Horiguchi, Naoto  
;
Mitard, Jerome  
;
Mocuta, Dan
;
Mocuta, Anda
;
Thean, Aaron  

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2 since deposited on 2021-10-23
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