Publication:

Towards high performance sub-10nm finW bulk FinFET technology

Date

2016
Proceedings Paper
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dc.contributor.authorChiarella, Thomas
dc.contributor.authorKubicek, Stefan
dc.contributor.authorRosseel, Erik
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorEyben, Pierre
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorKim, Min-Soo
dc.contributor.authorChew, Soon Aik
dc.contributor.authorSchram, Tom
dc.contributor.authorDemuynck, Steven
dc.contributor.authorCupak, Miroslav
dc.contributor.authorRynders, Luc
dc.contributor.authorDehan, Morin
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorMitard, Jerome
dc.contributor.authorMocuta, Dan
dc.contributor.authorMocuta, Anda
dc.contributor.authorThean, Aaron
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorCupak, Miroslav
dc.contributor.imecauthorRynders, Luc
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.date.accessioned2021-10-23T10:18:08Z
dc.date.available2021-10-23T10:18:08Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26446
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7599605/
dc.source.beginpage131
dc.source.conference46th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate12/09/2016
dc.source.conferencelocationLausanne Switzerland
dc.source.endpage134
dc.title

Towards high performance sub-10nm finW bulk FinFET technology

dc.typeProceedings paper
dspace.entity.typePublication
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