Publication:
Line edge roughness (LER) correlation and dielectric reliability with spacer-defined double patterning (SDDP) at 20nm half pitch
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1800 since deposited on 2021-10-19
2last month
Acq. date: 2025-12-16
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Metrics
Views
1800 since deposited on 2021-10-19
2last month
Acq. date: 2025-12-16
Citations