Publication:

Ge FETs gate stack passivation options and their scalability to low EOT

Date

2010
Proceedings Paper
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Author(s)

Bellenger, Florence
;
De Jaeger, Brice  
;
Nyns, Laura  
;
Zahid, Mohammed
;
Houssa, Michel  
;
Vrancken, Evi  
;
Tseng, Joshua
;
Caymax, Matty  
;
Meuris, Marc  
;
De Meyer, Kristin  
;
Heyns, Marc  
;
Hoffmann, Thomas Y.

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1978 since deposited on 2021-10-18
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