Publication:

Ge FETs gate stack passivation options and their scalability to low EOT

Date

2010

Proceedings Paper

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Author(s)

Bellenger, Florence

;

De Jaeger, Brice

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;

Zahid, Mohammed

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;

;

;

;

;

De Meyer, Kristin

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;

Hoffmann, Thomas Y.

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1983 since deposited on 2021-10-18

Acq. date: 2026-05-19