Publication:
Exploration of alternative mask for 0.33NA extreme ultraviolet single patterning at pitch 28-nm metal design
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Acq. date: 2026-01-26
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860 since deposited on 2022-08-12
46last month
7last week
Acq. date: 2026-01-26
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1694 since deposited on 2022-08-12
Acq. date: 2026-01-26
Citations