Publication:

TXRF saturation effects in atomic contamination analysis for advanced micro-electronic devices

Date

2005-03
Dissertation
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dc.contributor.authorHellin, David
dc.contributor.imecauthorHellin, David
dc.contributor.thesisadvisorVinckier, Chris
dc.contributor.thesisadvisorDe Gendt, Stefan
dc.date.accessioned2021-10-16T01:57:25Z
dc.date.available2021-10-16T01:57:25Z
dc.date.embargo9999-12-31
dc.date.issued2005-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10560
dc.title

TXRF saturation effects in atomic contamination analysis for advanced micro-electronic devices

dc.typePHD thesis
dspace.entity.typePublication
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