Publication:

Impact of Epi-Si growth temperature on Ge-pFET performance

Date

2009-09

Proceedings Paper

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Author(s)

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De Jaeger, Brice

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Plourde, Chelsea

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Hellings, Geert

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De Meyer, Kristin

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Hoffmann, Thomas Y.

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De Gendt, Stefan

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Statistics

1850 since deposited on 2021-10-18

Acq. date: 2026-02-27