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Impact of Epi-Si growth temperature on Ge-pFET performance
Publication:
Impact of Epi-Si growth temperature on Ge-pFET performance
Date
2009-09
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mitard, Jerome
;
Martens, Koen
;
De Jaeger, Brice
;
Franco, Jacopo
;
Shea, Chris
;
Plourde, Chelsea
;
Leys, Frederik
;
Loo, Roger
;
Hellings, Geert
;
Eneman, Geert
;
Wang, Wei-E
;
Lin, Vic
;
Kaczer, Ben
;
De Meyer, Kristin
;
Hoffmann, Thomas Y.
;
De Gendt, Stefan
;
Caymax, Matty
;
Meuris, Marc
;
Heyns, Marc
Journal
Abstract
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1847
since deposited on 2021-10-18
406
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1847
since deposited on 2021-10-18
406
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations