Publication:

Impact of Epi-Si growth temperature on Ge-pFET performance

Date

2009-09
Proceedings Paper
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dc.contributor.authorMitard, Jerome
dc.contributor.authorMartens, Koen
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorFranco, Jacopo
dc.contributor.authorShea, Chris
dc.contributor.authorPlourde, Chelsea
dc.contributor.authorLeys, Frederik
dc.contributor.authorLoo, Roger
dc.contributor.authorHellings, Geert
dc.contributor.authorEneman, Geert
dc.contributor.authorWang, Wei-E
dc.contributor.authorLin, Vic
dc.contributor.authorKaczer, Ben
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorCaymax, Matty
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-10-18T00:53:03Z
dc.date.available2021-10-18T00:53:03Z
dc.date.issued2009-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15876
dc.source.beginpage411
dc.source.conference39th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate14/09/2009
dc.source.conferencelocationAthens Greece
dc.source.endpage414
dc.title

Impact of Epi-Si growth temperature on Ge-pFET performance

dc.typeProceedings paper
dspace.entity.typePublication
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