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Vacuum ultra-violet emission of plasmas and their effect on etched materials

Date

2015
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dc.contributor.authorEl Otell, Ziad
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.imecauthorEl Otell, Ziad
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.date.accessioned2021-10-22T19:10:20Z
dc.date.available2021-10-22T19:10:20Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25248
dc.source.conference2nd SNM Workshop @ EVG in Austria
dc.source.conferencedate30/06/2015
dc.source.conferencelocationSt. Florian am Inn Austria
dc.title

Vacuum ultra-violet emission of plasmas and their effect on etched materials

dc.typeMeeting abstract
dspace.entity.typePublication
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