Publication:

Impact of direct CMP on surface and bulk properties of high porosity low-k materials

Date

2007

Proceedings Paper

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Files

13076.pdf 1.08 MB

Author(s)

;

Sinapi, Fabrice

;

Travaly, Youssef

;

;

Baklanov, Mikhaïl

;

Carbonell, Laure

;

Van Hoeymissen, Jan

;

;

Hernandez, Jose Luis

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